Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society.

v.9 no.1-2; v.9 no.3-4; v.9 no.5-6; v.10 no.1-3; v.10 no.4-5; v.10 no.6; v.11 no.1-3; v.11 no.4-5; v.11 no.6; v.12 no.1-2; v.12 no.3; v.12 no.4-5; v.12 no.6; v.13 no.1-3; v.13 no.4-6; v.14 no.1-2; v.14 no.5-6; v.15 no.1-2; v.15 no.3-4; v.15 no.5-6; v.16 no.1-2; v.16 no.3-4; v.16 no.6; v.17 no.1-2; v.17 no.3-4; v.17 no.5-6; v.18 no.3-4; v.18 no.5-6; v.19 no.1-4; v.19 no.5-6; v.20 no.1-2; v.20 no.3-4; v.20 no.5-6; v.21 no.1-2; v.21 no.3-4; v.21 no.5-6; v.22 no.1-2; v.22 no.3-4; v.22 no.5-6; v.23 no.1-2; v.23 no.3-4; v.23 no.5-6; v.24 no.1-2; v.24 no.3-4; v.24 no.5-6; v.25 no.1-3; v.25 no.4-6; v.26 no.1-2; v.26 no.3-4; v.26 no.5-6; v.27 no.1-2; v.27 no.3-4; v.27 no.5-6