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Journal of vacuum science & technology. processing, measurement, and phenomena : an official journal of the American Vacuum Society.

Program: CLOCKSS

• Publisher: Published for the Society by the American Institute of Physics
• Print ISSN: 1071-1023
• Electronic ISSN: 1520-8567
• OCLC Number:

• Summary Holdings: v.18 (2000); v.26 (2008)
• Holdings Format: Digital