Microlithography world.
- Publisher: Penn Well Publication, published in cooperation with SPIE
- Print ISSN: 1074-407X
- Electronic ISSN:
- OCLC Number: 28982886
- Subject: Semiconductors Design and construction Periodicals.
- Subject code:
- Publication history: Vol. 1, no. 1 (Mar./Apr. 1992)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| Arizona State University Shared Print in Storage (AZS) | WEST, WEST Silver | 3, no.3(1994)-15(2006) | 20351231 |
| University of Florida (FUG) | Florida Academic Repository (FLARE), Scholars Trust | v.8:no.4(1999:autumn)-v.17:no.1(2008:Feb.) | 20351231 |