Optical/laser microlithography.
- Publisher: SPIE-the International Society for Optical Engineering
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 27436764
- Subject: Lasers Industrial applications Congresses.
- Subject code: T
- Publication history: 2/4 Mar. 1988-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | no.1 1988; no.2 1989; no.3 1990; no.4 1991; no.5 pt.1 1992; no.5 pt.2 1992; no.6 pt.1 1993; no.6 pt.2 1993 | permanent |
| University of Pittsburgh (PIT) | EAST | 1989-1991; 1992:pt. 1-2 | 20310630 |