Materials science in semiconductor processing.
- Publisher: Pergamon
- Print ISSN: 1369-8001
- Electronic ISSN: 1873-4081
- OCLC Number: 39279731
- Subject: Semiconductors Periodicals.
- Subject code: T
- Publication history: Vol. 1, no. 1 (Apr. 1998)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| Linda Hall Library of Science, Engineering & Technology (LHL) | Linda Hall Library of Science, Engineering & Technology | v.1:no.3/4-v.2:no.3 (1998-1999), v.11-v.14:no.1 (Feb 2008-Mar 2011) | |
| Stanford Libraries Shared Print in Place (STF) | WEST, WEST Bronze | v.1(1998)-v.10(2007) | 20351231 |
| University of California, SRLF Shared Print (ZAS) | UCL Shared Print, Licensed Content | v.6-40(2003-2015)v.41-55(2016),v.57(2017) | 20351231 |
| University of Florida (FUG) | Florida Academic Repository (FLARE), Scholars Trust | v.1(1998)-v.7(2004) | 20351231 |
Digital Holdings
| Program | Holdings Description |
|---|---|
| CLOCKSS | v.1-v.5 (2019-2022) |