IEEE International Symposium on Semiconductor Manufacturing conference proceedings.
- Publisher: Institute of Electrical and Electronics Engineers
- Print ISSN: 1523-553X
- Electronic ISSN:
- OCLC Number: 39283054
- Subject: Semiconductors Design and construction Congresses.
- Subject code: T
- Publication history: 1997-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 97CB36023 1997; 00CB37130 2000; 01CH37203 2001; 03CH37462 2003; 05CH37682 2005; 99CB36314 | permanent |
| University of Kansas Shared Print in Storage (KKU) | WEST, WEST Bronze | (1997), (1999-2001) | 20351231 |