Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 36046330
- Subject: Lithography, Electron beam Congresses.
- Subject code: QC
- Publication history: [1] (6-7 Mar. 1991)-4 (28 Feb.-1 Mar. 1994).
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1991-1994 | permanent |