Microlithography and metrology in micromachining.
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 35907271
- Subject: Microlithography Congresses.
- Subject code: QC
- Publication history: [1] (23-24 Oct. 1995)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1995-1997 | permanent |