Micromachining and microfabrication process technology.
- Publisher: SPIE--The International Society for Optical Engineering
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 36014901
- Subject: Micromechanics Congresses.
- Subject code: QC
- Publication history: [1] (1995)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | v.1 1995; v.2 1996; v.3 1997; v.4 1998; v.5 1999; v.6 2000; v.7 2001; v.8 2003; v.9 2004; v.10 2005; v.11 2006 | permanent |