Metrology, inspection, and process control for microlithography /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 35781402
- Subject: Microlithography Congresses.
- Subject code: T
- Publication history: 10 (11-13 Mar. 1996)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | v.10 1996; v.11 1997; 1998; 1999 pt.1; 1999 pt.2; 2000-2001; 2002 pt.1; 2002 pt.2; 2003 pt.1; 2003 pt.2; 2004 pt.1; 2004 pt.2; 2005 pt.1; 2005 pt.2; 2005 pt.3; 2006 pt.1; 2006 pt.2; 2007 pt.1; 2007 pt.2; 2007 pt.3 | permanent |