Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays.
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 39138935
- Subject: Semiconductor wafers Measurement Congresses.
- Subject code: QC
- Publication history: [1] (8-9 Aug. 1996)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1996; 1998 | permanent |