Materials science of microelectromechanical systems (MEMS) devices :
- Publisher: Materials Research Society
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 45277509
- Subject: Microelectromechanical systems Congresses.
- Subject code: T
- Publication history: [1] (Dec. 1-2, 1998)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1998-2001 | permanent |