Device and process technologies for MEMS and microelectronics /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 49713564
- Subject: Microelectromechanical systems Congresses.
- Subject code: T
- Publication history: [1] (27-29 Oct. 1999)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1999; 2001; 2003; 2005 | permanent |