Gate stack and silicide issues in silicon processing.
- Publisher: Materials Research Society
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 49732158
- Subject: Integrated circuits Ultra large scale integration Materials Congresses.
- Subject code: T
- Publication history: [1] (Apr. 25-27, 2000)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2000-2001 | permanent |