Design, process integration, and characterization for microelectronics /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 244104316
- Subject: Integrated circuits Design and construction Congresses.
- Subject code: T
- Publication history: 6-7 Mar. 2002.
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2002 | permanent |