Surface scattering and diffraction for advanced metrology /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 52103678
- Subject: Surface roughness Measurement Congresses.
- Subject code: T
- Publication history: [1] (1 Aug. 2001)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2001-2002 | permanent |