Reliability, testing, and characterization of MEMS/MOEMS.
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 52939376
- Subject: Microelectromechanical systems Reliability Congresses.
- Subject code: T
- Publication history: [1] (22-24 Oct. 2001)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2001; 2003-2004 | permanent |