MEMS components and applications for industry, automobiles, aerospace, and communication.
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 52939602
- Subject: Microelectromechanical systems Design and construction Congresses.
- Subject code: T
- Publication history: [1] (22-23 Oct. 2001)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2001; 2003 | permanent |