Design and process integration for microelectronic manufacturing /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 55533198
- Subject: Integrated circuits Design and construction Congresses.
- Subject code: T
- Publication history: 2 (26-28 Feb. 2003)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2003-2006 | permanent |