Ultra clean processing of silicon surfaces :
- Publisher: Scitec Publications ;
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 47180871
- Subject: Silicon Surfaces Congresses.
- Subject code: T
- Publication history:
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2002; 2004 | permanent |