MEMS, MOEMS, and micromachining.
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 70225244
- Subject: Microelectromechanical systems Congresses.
- Subject code: T
- Publication history: [1] (29-30 Apr. 2004)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2004; 2006 | permanent |