Advances in resist materials and processing technology /
- Publisher: SPIE
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 144617612
- Subject: Photoresists Congresses.
- Subject code: T
- Publication history: 24 (26-28 Feb. 2007)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 2007 pt.1; 2007 pt.2 | permanent |