Technical program proceedings /
- Publisher: Semiconductor Equipment and Materials Institute
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 13152481
- Subject: Semiconductors Congresses.
- Subject code: T
- Publication history:
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1982-1987; 1991 | permanent |