Journal of micro/nanolithography, MEMS, and MOEMS : JM3
- Publisher: SPIE-The International Society for Optical Engineering
- Print ISSN: 1932-5150
- Electronic ISSN: 1932-5134
- OCLC Number: 70598798
- Subject: Microelectronics Periodicals
- Subject code:
- Publication history: Began with: Vol. 6, no. 1 (Jan.-Mar. 2007)
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | v.7 | permanent |
| Linda Hall Library of Science, Engineering & Technology (LHL) | Linda Hall Library of Science, Engineering & Technology | v.6(2007)-v.12:no.4(2013:Oct./Dec.) | |
| University of California, SRLF Shared Print (ZAS) | UCL Shared Print, Licensed Content | v.6-14(2007-2015)v.15:no.1-2(2016) | 20351231 |
Digital Holdings
| Program | Holdings Description |
|---|---|
| CLOCKSS | (2002-2016) |