Journal of microlithography, microfabrication, and microsystems : JMp3s.
- Publisher: SPIE-The International Society for Optical Engineering
- Print ISSN: 1537-1646
- Electronic ISSN: 1817-6461
- OCLC Number: 47980915
- Subject: Microelectronics Periodicals.
- Subject code: T
- Publication history: Vol. 1, no. 1 (Apr. 2002)-
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| Linda Hall Library of Science, Engineering & Technology (LHL) | Linda Hall Library of Science, Engineering & Technology | Vol. 1 no. 1 (April 2002) -Vol. 1 no. 3 (October 2002); Vol. 2 no. 1 (January 2003) -Vol. 4 no. 4 (December 2005); Vol. 3 no. 4 (October 2004); Vol. 4 no. 3 (July/September 2005); Vol. 5 no. 1 (January-March 2006); Vol. 5 no. 2 (April-June 2006); Vol. 5 no. 3 (July 2006) -Vol. 5 no. 4 (December 2006) | |
| University of California, SRLF Shared Print (ZAS) | WEST, WEST Bronze, UCL Shared Print | v.4-5(2005-2006) | 20351231 |