Program: HathiTrust Digital Library
- Publisher: Semiconductor Equipment and Materials Institute
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 17022059
- Validation: None
- Retention: permanent
- Institution: HathiTrust
- Facility:
- OCLC Symbol: HATHI
- Holdings Format: Print
| Materials | Archive Action | Date of Action | Program | Status/Note |
|---|---|---|---|---|
|
1983
|
committed to retain | 2011-03-15 | HTDL |
|