Technical program proceedings /
- Publisher: Semiconductor Equipment and Materials Institute
- Print ISSN:
- Electronic ISSN:
- OCLC Number: 17022059
- Subject: Integrated circuits Very large scale integration Congresses.
- Subject code: T
- Publication history:
Print Holdings
| Archiving Institution | Program | Holdings Description | Retention |
|---|---|---|---|
| HathiTrust (HATHI) | HTDL | 1983 | permanent |